The cleaning work of quartz tube is not simple as imagined. Strong quartz sorted out the detailed cleaning matters, so that every step of the cleaning work is very transparent. Let's take a look.
1. The whole process of cleaning quartz tube should be carried out in strict accordance with the safety standards related to diffusion process.
2. If there is used hydrofluoric acid solution in the cleaning tank, 10 bottles of hydrofluoric acid can be added if the solution is not dirty (assigned by the production personnel); If the original hydrofluoric acid solution is dirty, the tank should be completely emptied and cleaned, and then the production personnel should be notified to mix the solution; If there is no hydrofluoric acid solution left in the tank, wash the tank and ask the production personnel to mix the solution.
3. The cleaning personnel must wear protective glasses and acid-proof gloves, and then put the spare quartz tube into the slot near the inside of the quartz tube cleaning machine, with the tube mouth facing the cashmere room and the tube tail pointing in the direction of the diffusion furnace. Pull down the protective door, set the cleaning time of acid tank to 30min, and press the "acid tank start" button in the control panel.
4. Setting of acid tank cleaning time:
The new quartz tube only takes about 30 minutes to clean. If it is used quartz tube, should be adhered to the wall of the white phosphorus pentoxide all off the time shall prevail. Cleaning used pipes can take a day or two. When the acid tank is not started, the quartz tube should be rotated 180° every 2 hours.
5. The cleaning personnel should wear protective glasses and gloves, take out the quartz tube from the acid tank, and gently put it into the water tank. Drain the water in the tank and flush the inside and outside walls of the quartz tube with a water gun for about 5 minutes. Do not press the "sink start" button when washing the inner wall of the quartz tube. If it has been pressed, press the "sink end" button again. Then pull the water gun to the mouth of the quartz tube and flush the inner wall of the tube from the mouth to the end. Rinse carefully, do not have residual areas not flushed. After 2 minutes, rotate the quartz tube 180° and rinse in the same way for 2 minutes.
6. Pour pure water into the tank, and the water level shall be up to the middle vent tube at the tail of the quartz tube. Pull down the protective door, then set the sink cleaning time to 30min and press the "sink start" button.
7. Repeat Step 6 and wash again.
8. When the sink is finished, empty the water in the sink. Then, flush the quartz tube/outer wall with a water gun as in Step 5 above. Mainly wash the inner wall. About 5 minutes later, rinse the four small ventilation pipes at the end of the pipe with water gun, which are also the inner wall of the pipe. Rinse for 2 minutes before continuing to flush from the nozzle. The cleaning time of this step should be no less than 15min, and no granular phosphide remains on the inner and outer walls of the tube should be the symbol of clean cleaning.
9. After cleaning, put the quartz tube in the designated position of the purification room, and pad the special foam below.
10. Seal the nozzle and tail pipe with special aluminum foil.
As can be seen from the above content, the cleaning work of quartz tube is so careful, and the relevant personnel of quartz tube should pay more attention to oh.